Vision Commands¶

`vis:align_die`¶

Sentio Version: 3.0.2

Description: Aligns a single die based on two trained pattern positions. Execution should start from the trained home position.

Parameters:

Parameter	Type	Notes
Theta Threshold (opt.)	Float	Range 0.01–5; default 0.05

Response:

Field	Type
X Offset	Float
Y Offset	Float
Theta Offset	Float

Example:

Command:   vis:align_die 0.05
Response:  0,0,-500,300,2.15    (after rotation, moved X -500 µm, Y 300 µm, rotated 2.15°)

Remarks: Ensure the response buffer has ≥512 bytes. Requires trained "one/two patterns" and a trained rotation center. Set die home position, and ensure the current FOV center is at the die home position before executing. If a backup pattern was trained, it is used when the primary pattern cannot be found. Theta Threshold is the maximum allowed difference between the trained two-pattern angle and the post-align rotation. X/Y offsets are "offset of start position in chuck coordinate system".

`vis:align_wafer`¶

Sentio Version: 2.8.1

Description: Executes the auto-alignment function using the existing image pattern.

Parameters:

Parameter	Type	Values	Notes
Timeout Value (opt.)	Integer	—	Positive integer [ms]; default 18000 ms; minimum 1000 ms
2 Point Align (opt.)	String	`2pt`	Executes a 2-point wafer align

Response:

Field	Type	Values
State	String	`OK` (success); `Autoalign timeout`; `Missing align pattern` (re-teach the align pattern); `RIO size is different from pattern size` (re-teach the align pattern)

Examples:

Command:   vis:align_wafer
Response:  0,0,OK     (wafer align with same die size)

Command:   vis:align_wafer 2pt
Response:  0,0,OK     (wafer align with 2-point align)

`vis:auto_focus`¶

Sentio Version: 2.9.2, updated 3.0.2

Description: Executes the auto-focus function.

Parameters:

Parameter	Type	Values
Action (opt.)	String	`Calibration` (executes the calibration function), `GoToFocus` (goes to rough focus position)

Response:

Field	Type	Values
Axis Position [µm]	Float	—
Movement Axis	String	`Scope`, `Imagpro`, `Chuck`

Examples:

Command:   vis:auto_focus
Response:  0,0,42000,chuck

Command:   vis:auto_focus
Response:  0,0,-13000,scope

Command:   vis:auto_focus Calibration
Response:  0,0,-13000,scope

Command:   vis:auto_focus GoToFocus
Response:  0,0,-13000,scope    (GoToFocus movement axis is scope only)

Remarks: Requires hardware support.

Update Logs: 3.0.2 — added GoToFocus parameter.

`vis:compensation:enable`¶

Sentio Version: 3.3.0

Description: Sets up the compensation mode for the on-axis camera.

Parameters:

Parameter	Type	Values
Mode	String	`Lateral`, `Vertical`, `Both` (Lateral + Vertical), `ProbeCard`
Status	String	`False`, `True`

Response:

Field	Type
XY Mode	String
Z Mode	String

Examples:

Command:   vis:compensation:enable Lateral,True
Response:  0,0,Lateral,None

Command:   vis:compensation:enable Vertical,True
Response:  0,0,Lateral,Vertical

Command:   vis:compensation:enable Both,False
Response:  0,0,None,None

Command:   vis:compensation:enable ProbeCard,True
Response:  0,0,Ptpa,Vertical

Remarks: ProbeCard only affects the on-axis camera.

`vis:compensation:start_execute` [asynchronous]¶

Sentio Version: 3.3.0, updated 3.4.5/3.5.3, 3.6.0, 23.1.0

Description: Starts detection of the wafer/tip offset. Once processing finishes, the chuck returns to its original position.

Parameters:

Parameter	Type	Values
Type	String	`OnTheFly`, `Offaxis`, `MapScan`, `Topography`, `SkateDetection` (RF probe detection)
Mode	String	`Lateral`, `Vertical`, `Both` (Lateral + Vertical), `LateralWithProbeTips` (PTPA updates pads & tips X/Y), `VerticalWithProbeTips` (PTPA updates pads & tips Z), `BothWithProbeTips` (PTPA updates pads & tips X/Y/Z)
Additional	Boolean	`True`/`False` — move to offset position (only affects DieAlign & Lateral/Vertical/Both)

Response:

Field	Type
Command ID	String

Example:

Command:   vis:compensation:start_execute OnTheFly,Both,True
Response:  0,6,OK    (starts OnTheFly Lateral/Vertical processing, command ID 6; chuck moves to offset position when done)

Application Examples:

Command:   vis:compensation:start_execute Topography
Response:  0,5,OK

Command:   wait_complete 5
Response:  0,0,OK

Command:   vis:compensation:start_execute OnTheFly,BothWithProbeTips
Response:  0,6,OK     (PTPA processing including pad/tip XYZ offset detection)

Command:   wait_complete 6
Response:  0,0,OK

Remarks: This is an asynchronous command; it responds immediately with a Command ID.

Update Logs: 3.4.5/3.5.3 — added the Additional parameter (move offset position or not). 3.6.0 — added SkateDetection mode. 23.1.0 — added OnTheFly, Offaxis, SkateDetection types.

`vis:enable_follow_mode`¶

Sentio Version: 2.8.1

Description: Enables/disables scope follow mode.

Parameters:

Parameter	Type	Values
Status	Integer / String	`0`/`OFF`/`False`, `1`/`ON`/`True`

Response:

Field	Type	Values
Setup	String	`OK`

Example:

Command:   vis:enable_follow_mode ON
Response:  0,0,OK

Remarks: Requires hardware support.

`vis:find_home`¶

Sentio Version: 2.8.1

Description: Finds and updates the "Home" position using the trained "Home" pattern.

Parameters: None

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: If the operation fails, an error message is returned. Camera is not case sensitive.

`vis:find_pattern`¶

Sentio Version: 3.0.2, updated 3.1.1

Description: Executes pattern search in the current field of view and returns the pattern offset.

Parameters:

Parameter	Type	Values	Notes
Pattern Name	String	`Align` (wafer align pattern), `Home` (find home pattern), `DieAlignPos1` (lateral compensation pattern 1), `DieAlignPos2` (lateral compensation pattern 2), `2pt` (wafer 2-point align pattern)
Threshold (opt.)	Integer	—	Range 30–99; default 70
Pattern Index (opt.)	Integer	—	Range 0–1; default 0
Reference Die Home (opt.)	String	`DieHome`	—

Response:

Field	Type
Score	Integer
X Offset	Float
Y Offset	Float
Theta Offset	Float

Examples:

Command:   vis:find_pattern Align,70
Response:  0,0,92,-1000,500,0.5,75,499,-9865,2.0

Command:   vis:find_pattern 2pt,70
Response:  0,0,90,-500,500,0.2,75,499,-9865,2.0

Application Example:

Command:   vis:find_pattern DieAlignPos1,70,0,diehome
Response:  0,0,90,700,-300,0.5

Command:   move_chuck_xy relative,-700,300
Response:  0,0,108700,-106800    (moves current position to die home position (108700,-106800) µm)

Remarks: Ensure the response buffer has ≥512 bytes. "Reference Die Home" only supports Home, DieAlignPos1, and DieAlignPos2 patterns. X/Y offset is "offset of image center in chuck coordinate system" (or ROI center, if ROI is enabled). If Reference Die Home is enabled, X/Y is the current position's offset to die home (or to ROI center, if ROI is also enabled). This command only performs recognition in the current FOV — no movement occurs, so settling time is not used.

Update Logs: 3.1.1 — added the Reference Die Home parameter.

`vis:find_thermal_die_size`¶

Sentio Version: 2.9.2

Description: Re-checks die size under temperature. Requires "Auto-Align Image Pattern". Computes a new thermal factor relative to the original die size; the new thermal die size is not written back to the wafer map.

Parameters:

Parameter	Type	Values
Timeout Value (opt.)	Integer	Positive integer [ms]

Response:

Field	Type
Thermal Factor X	Float
Thermal Factor Y	Float

Example:

Command:   vis:find_thermal_die_size
Response:  0,0,1.00005,1.00004   (thermal factor X=1.0005, Y=1.0004; e.g. a 10000×10000 µm die becomes 10005×10004 µm)

Remarks: May take a long time — ensure a sufficient host timeout.

`vis:get_light_status`¶

Sentio Version: 2.8.1, updated 3.7.0

Description: Retrieves the status of a camera light source.

Parameters:

Parameter	Type	Values
Camera	String	`Scope`, `VCE01`, `VCE02`

Response:

Field	Type	Values
Status	Integer	`0`, `1`

Remarks: Camera is not case sensitive.

Update Logs: 3.7.0 — added VCE02 camera parameter.

`vis:get_lens_zoom_level`¶

Sentio Version: 3.6.0

Description: Gets the zoom level of an AMZ12 lens.

Parameters: None

Response:

Field	Type
Zoom Level	String

Example:

Command:   get_lens_zoom_level
Response:  0,0,10     (10x magnification)

Remarks: Requires hardware support.

`vis:get_prop`¶

Sentio Version: 3.1.1

Description: Generic function to retrieve the value of a specific data item from the vision module.

Parameters:

Property Name	Additional Parameters
`Gain` — digital signal amplification of a camera	1. Camera Mount Point
`Exposure` — exposure time in ms	1. Camera Mount Point
`Light` — brightness of a light source connected to a camera	1. Camera Mount Point

Camera Mount Point values: Scope, Chuck, OffAxis.

Response: Depends on the data property.

Example:

Command:   vis:get_prop exposure, scope
Response:  0,0,50     (exposure time of the scope camera)

`vis:pattern:get_chuck_pos`¶

Sentio Version: 3.2.0

Description: Gets the pattern location on the wafer.

Parameters:

Parameter	Type	Values
Camera	String	`Scope`, `Scope2` (iMAGPro2 only), `OffAxis`
Pattern Name	String	`Align`, `Home`, `DieAlignPos1`, `DieAlignPos2`, `2pt`

Response:

Field	Type
X Position	Double
Y Position	Double

Example:

Command:   vis:pattern:get_chuck_pos scope,home
Response:  0,0,100000,-100000    (home pattern position on the chuck)

Remarks: Scope2 only supported on iMAGPro2.

`vis:pattern:set_chuck_pos`¶

Sentio Version: 3.2.0

Description: Overwrites the pattern location on the wafer. Affects the automatic pattern-search starting position.

Parameters:

Parameter	Type	Values
Camera	String	`Scope`, `Scope2` (iMAGPro2 only), `OffAxis`
Pattern Name	String	`Align`, `Home`, `DieAlignPos1`, `DieAlignPos2`, `2pt`
X Position	Double	—
Y Position	Double	—

Response:

Field	Type
X Position	Double
Y Position	Double

Example:

Command:   vis:pattern:set_chuck_pos scope,home,100000,-100000
Response:  0,0,100000,-100000    (resets the home pattern position on the chuck)

Remarks: Scope2 only supported on iMAGPro2.

`vis:set_lens_zoom_level`¶

Sentio Version: 3.6.0

Description: Sets the objective zoom of the automatic magnification lens.

Parameters:

Parameter	Type	Values
Level	Double	`0.83`, `1`, `2`, `3`, `4`, `5`, `6`, `7`, `8`, `9`, `10`

Response:

Field	Type	Values
Status	String	`OK`

Example:

Command:   vis:set_lens_zoom_level 0.83
Response:  0,0,0.83

Remarks: Only supported on the AMZ12 scope type.

`vis:set_prop`¶

Sentio Version: 3.1.1, updated 3.2.0

Description: Generic function to set the value of a specific data item of the vision module.

Parameters:

Property Name	Additional Parameters	Notes
`Gain`	1. Camera Mount Point, 2. Gain Value	Digital signal amplification
`Exposure`	1. Camera Mount Point, 2. Exposure Value	Exposure time in ms
`Light`	1. Camera Mount Point, 2. Brightness, 3. Light Type (`Coaxial`, `Ring`)	Light source brightness
`jpeg_quality`	1. Value (integer 10–100)	Controls saved JPEG quality; no Camera Mount Point parameter

Camera Mount Point values: Scope, Chuck, OffAxis.

Response: Depends on the data property.

Examples:

Command:   vis:set_prop exposure, scope, 100
Response:  0,0,OK     (sets scope camera exposure to 100 ms)

Command:   vis:set_prop light, scope, 100, Ring
Response:  0,0,OK     (sets scope camera ring light value to 100)

Update Logs: 3.2.0 — added the jpeg_quality property.

`vis:start_fast_track` [asynchronous]¶

Sentio Version: 3.7.0

Description: Starts the "Fast track" sequence to prepare the wafer for operation.

Parameters: None

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Executes the "Fast track" sequence defined in the current project. See "Asynchronous Commands" for the response-retrieval procedure.

`vis:snap_image`¶

Sentio Version: 2.8.1

Description: Takes a snapshot of the currently active camera image and saves it to file.

Parameters:

Parameter	Type	Values	Notes
File Path	String	—
With Overlays (opt.)	Integer / String	`0`/`False` (default), `1`/`True`	Whether to save the video view with overlays or the raw camera image

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Available formats: BMP, JPG, PNG, TIF. A non-absolute File Path is relative to the current project folder.

`vis:switch_all_lights`¶

Sentio Version: 2.8.1

Description: Switches all camera light sources on or off.

Parameters:

Parameter	Type	Values	Notes
Status	Integer / String	`0`/`OFF`/`False`, `1`/`ON`/`True`
Delay Time (opt.)	Float	—	Seconds; min 0.5, max 10

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Status is not case sensitive.

`vis:switch_camera`¶

Sentio Version: 2.8.1, updated 3.7.0

Description: Activates a camera.

Parameters:

Parameter	Type	Values
Camera	String	`Scope`, `VCE01`, `VCE02`

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Not case sensitive.

Update Logs: 3.7.0 — added VCE02 camera parameter.

`vis:switch_light`¶

Sentio Version: 2.8.1, updated 3.7.0

Description: Switches a camera light source on or off.

Parameters:

Parameter	Type	Values	Notes
Camera	String	`Scope`, `VCE01`, `VCE02`, `OffAxis`
Status	Integer / String	`0`/`OFF`/`False`, `1`/`ON`/`True`
Delay Time (opt.)	Float	—	Seconds; min 0.5, max 10

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Not case sensitive. OffAxis requires hardware support.

Update Logs: 3.7.0 — added VCE02 camera parameter.

Vision Commands¶

vis:align_die¶

vis:align_wafer¶

vis:auto_focus¶

vis:compensation:enable¶

vis:compensation:start_execute [asynchronous]¶

vis:enable_follow_mode¶

vis:find_home¶

vis:find_pattern¶

vis:find_thermal_die_size¶

vis:get_light_status¶

vis:get_lens_zoom_level¶

vis:get_prop¶

vis:pattern:get_chuck_pos¶

vis:pattern:set_chuck_pos¶

vis:set_lens_zoom_level¶

vis:set_prop¶

vis:start_fast_track [asynchronous]¶

vis:snap_image¶

vis:switch_all_lights¶

vis:switch_camera¶

vis:switch_light¶

`vis:align_die`¶

`vis:align_wafer`¶

`vis:auto_focus`¶

`vis:compensation:enable`¶

`vis:compensation:start_execute` [asynchronous]¶

`vis:enable_follow_mode`¶

`vis:find_home`¶

`vis:find_pattern`¶

`vis:find_thermal_die_size`¶

`vis:get_light_status`¶

`vis:get_lens_zoom_level`¶

`vis:get_prop`¶

`vis:pattern:get_chuck_pos`¶

`vis:pattern:set_chuck_pos`¶

`vis:set_lens_zoom_level`¶

`vis:set_prop`¶

`vis:start_fast_track` [asynchronous]¶

`vis:snap_image`¶

`vis:switch_all_lights`¶

`vis:switch_camera`¶

`vis:switch_light`¶