Automation Handling Commands

These commands operate the automated wafer loader (cassette stations, wafer wallet, prealigner, chuck). "Wafer wallet max" behaves like a cassette, so its station parameter is cassette1. Commands with header ts2500: are legacy and superseded by the loader: header (e.g. ts2500:scan_station → loader:scan_station).

loader:has_station

Sentio Version: 3.0.2

Description: Queries whether a given station is present.

Parameters:

Parameter	Type	Values
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, pa/prealigner, chuck

Response:

Field	Type	Values
Cassette Presence	Integer	0=not present, 1=present

Example:

Command:   loader:has_station cas1
Response:  0,0,1     (cassette station 1 is present)

Remarks: Supported for fully-automatic machines.

loader:has_cassette

Sentio Version: 3.0.2

Description: Queries whether a cassette is present in a given cassette station.

Parameters:

Parameter	Type	Values
Station	String	cas1/cassette1, cas2/cassette2

Response:

Field	Type	Values
Cassette Presence	Integer	0=not present, 1=present
Wafer Size [mm]	Integer	0 if unknown; sizes < 100mm are indistinguishable and reported as 50

Example:

Command:   loader:has_cassette cas1
Response:  0,0,1,100    (cassette 1 station has a 100 mm cassette)

Remarks: Only meaningful for machine type TS2500 — other machine types always return 0 for both fields.

loader:load_wafer

Sentio Version: 3.0.2

Description: Loads a wafer from wafer wallet max (TS3500/TS2000IFE), wafer wallet (TS3500), cassette (TS2500), or side door (TS2000-SE) onto the chuck. Includes prealigner wafer align/read wafer ID for TS3500/TS2500/TS2000IFE.

Parameters:

Parameter	Type	Values
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2
Slot / Tray	Integer	Cassette stations: 1–25; Wafer Wallet: 1–5
PreAligner Align Angle (opt.)	Integer	0, 45, 90, 135, 180, 225, 270, 315

Response:

Field	Type	Notes
Setup	String	OK, or the Wafer ID if the system has an ID reader

Examples:

Command:   loader:load_wafer
Response:  0,0,OK              [TS2000-SE] loads wafer from side door.

Command:   loader:load_wafer cassette1,1
Response:  0,0,OK              [TS2500/wafer wallet max] loads from cassette 1 slot 1, aligns by wafer map angle, moves to chuck.

Command:   loader:load_wafer cassette1,1,90
Response:  0,0,AST_Wafer       loads from cassette 1 slot 1, aligns by 90°, moves to chuck (system has ID reader).

Command:   loader:load_wafer waferwallet,1
Response:  0,0,OK              [wafer wallet] loads from wallet 1, moves directly to chuck.

Command:   loader:load_wafer waferwallet,1,90
Response:  0,0,AST_Wafer       [wafer wallet] loads from wallet 1, aligns by 90°, moves to chuck (ID reader present).

Remarks: Pre-align and ID reading require hardware support.

loader:prealign

Sentio Version: 3.0.2

Description: Starts pre-alignment of a wafer. If an ID reader exists, reading the wafer ID is the default behavior.

Parameters:

Parameter	Type	Values	Notes
Type	String	Flat, Notch
Orientation	Integer	0, 45, 90, 135, 180, 225, 270, 315	Flat/notch target angle
Read Wafer ID (opt.)	Boolean	True (default), False	Execute read wafer ID

Response:

Field	Type	Values
Setup	String	OK

Examples:

Command:   loader:prealign flat,180
Response:  0,0,OK     (pre-aligns a flat wafer to 180°)

Command:   loader:prealign flat,180,false
Response:  0,0,OK     (pre-aligns and skips reading wafer ID, if ID reader present)

Remarks: Supported on pre-aligner machine types. The system auto-detects ID reader hardware. Default Read Wafer ID is True.

loader:query_wafer_id

Sentio Version: 3.0.2

Description: Queries the wafer ID that already exists.

Parameters:

Parameter	Type	Values
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, pa/prealigner, chuck
Slot / Tray	Integer	Cassette stations: 1–25; Wafer Wallet: 1–5

Response:

Field	Type
Wafer ID	String

Example:

Command:   loader:query_wafer_id cassette1, 1
Response:  0,0,MPI_AST_01

loader:query_wafer_status

Sentio Version: 3.4.0

Description: Queries the current wafer status.

Parameters:

Parameter	Type	Values
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, pa/prealigner, chuck
Slot / Tray	Integer	Cassette stations: 1–25; Wafer Wallet: 1–5

Response:

Field	Type
Origin Station	String
Origin Slot	Integer
Wafer Size [mm]	Integer
Orientation [deg.]	Integer
Progress Value [%]	Integer

Examples:

Command:   loader:query_wafer_status cassette1, 1
Response:  0,0,cassette1,1,200,0,0

Command:   loader:query_wafer_status chuck
Response:  0,0,cassette2,25,150,90,0

Command:   loader:query_wafer_status chuck
Response:  0,0,Wafer is load from front door

Command:   loader:query_wafer_status pa
Response:  0,0,WaferWallet,5,300,0,0

loader:read_wafer_id

Sentio Version: 3.0.2, updated 3.5.4

Description: Triggers the ID reader to read the wafer ID. The wafer must already be on the PreAligner.

Parameters:

Parameter	Type	Values
Wafer ID angle (opt.)	Number / String	A number in range -180…+180; or None (read ID only, no wafer rotation)

Response:

Field	Type
Wafer ID	String

Examples:

Command:   loader:read_wafer_id
Response:  0,0,MPI_AST_01

Command:   loader:read_wafer_id 180
Response:  0,0,MPI_AST_01

Command:   loader:read_wafer_id None
Response:  0,0,MPI_AST_01    (wafer does not rotate)

Remarks: Requires ID-reader hardware.

Update Logs: 3.5.1 — added optional rotation-angle parameter. 3.5.4 — added None to skip rotating the wafer before reading ID.

loader:scan_station

Sentio Version: 3.0.2

Description: Scans the wafer-presence status of a specific station.

Parameters:

Parameter	Type	Values
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, pa/prealigner, chuck, Fork

Response:

Field	Type	Values
Cassette Presence	Integer	-1=unknown, 0=empty slot, 1=slot has a wafer, 2=cross-slotted wafer (cassette stations only)

Examples:

Command:   loader:scan_station
Response:  7,0,Invalid number of Parameters    (required parameter omitted)

Command:   loader:scan_station prealigner
Response:  0,0,1     (single slot; there is a wafer on the prealigner)

Command:   loader:scan_station chuck
Response:  0,0,1     (single slot; there is a wafer on the chuck)

Command:   loader:scan_station cas1
Response:  0,0,00000000000000000000012201   (sequence: slot 25 to slot 1; one character per slot)

Command:   loader:scan_station ww
Response:  0,0,01101     (sequence: tray 5 to tray 1)

Remarks: Supported only on fully automatic machines.

loader:set_wafer_id

Sentio Version: 3.4.5 / 3.5.3, updated 3.6.0

Description: Resets the wafer ID.

Parameters:

Parameter	Type	Values	Notes
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, PreAligner, Chuck
Slot / Tray	Integer	—	Cassette: 1–25; Wafer Wallet: 1–5; PreAligner/Chuck: 1
Wafer ID	String	—

Response:

Field	Type
Wafer ID	String

Examples:

Command:   loader:set_wafer_id cassette1,1, MPI_AST_01
Response:  0,0,MPI_AST_01

Command:   loader:set_wafer_id PreAligner,1, MPI_AST_01
Response:  0,0,MPI_AST_01

Update Logs: Added after 3.4.5 in the SENTIO 3.4 series and after 3.5.3 in the SENTIO 3.5 series. 3.6.0 — added PreAligner and Chuck stations.

loader:start_prepare_station [asynchronous]

Sentio Version: 3.2.0

Description: Scans a station and reads the ID of all present wafers.

Parameters:

Parameter	Type	Values
Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2
Prealign Angle (opt.)	Float	—
Type (opt.)	String	Flat, Notch

Response:

Field	Type
ID List	String

Application Example:

Command:   loader:start_prepare_station cas2
Response:  0,8,OK               (returns immediately; command ID 8)

Command:   query_command_status 8
Response:  23,0,1                (CommandPending — see "Receiving Commands")

Remarks: If a pre-aligner is present and Prealign Angle is not submitted, it defaults to 0; if no pre-aligner is present, Prealign Angle must not be submitted. The returned ID List contains the wafer ID for every slot in the station (empty string for empty/erroneous slots).

loader:transfer_wafer

Sentio Version: 3.0.2

Description: Moves a wafer from one station/slot to another.

Parameters:

Parameter	Type	Values
Source Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, pa/prealigner, chuck
Source Station Slot	Integer	Cassette: 1–25; Wafer Wallet: 1–5; Prealigner/Chuck: 1
Destination Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, pa/prealigner, chuck
Destination Station Slot	Integer	Cassette: 1–25; Wafer Wallet: 1–5; Prealigner/Chuck: 1

Response:

Field	Type	Values
Setup	String	OK

Examples:

Command:   loader:transfer_wafer chuck,1,pa,1
Response:  0,0,OK    (chuck to prealigner)

Command:   loader:transfer_wafer prealigner,1,chuck,1
Response:  0,0,OK    (prealigner back to chuck)

Command:   loader:transfer_wafer chuck,1,cassette,auto
Response:  0,0,OK    (chuck back to its original slot)

Command:   loader:transfer_wafer cas1,10,cas1,11
Response:  0,0,OK    (cassette 1 slot 10 to cassette 1 slot 11; destination slot must be empty)

Remarks: Supported on fully automatic machines.

loader:unload_wafer

Sentio Version: 3.0.2

Description: Unloads a wafer from the chuck to wafer wallet max (TS3500/TS2000IFE), wafer wallet (TS3500), cassette (TS2500), or side door (TS2000-SE).

Parameters:

Parameter	Type	Values
Station (opt.)	String	ww/waferwallet, cas1/cassette1, cas2/cassette2
Slot / Tray (opt.)	Integer	Cassette: 1–25; Wafer Wallet: 1–5

Response:

Field	Type	Values
Setup	String	OK

Examples:

Command:   loader:unload_wafer
Response:  0,0,OK              [TS2000-SE] unloads to side door (wafer must have loaded from side door)

Command:   loader:unload_wafer cassette1,1
Response:  0,0,OK              [TS2500/wafer wallet max] unloads chuck to cassette 1, slot 1

Command:   loader:unload_wafer
Response:  0,0,OK              [TS3500] unloads chuck to its original wafer wallet tray

Remarks: TS3500 only supports unloading back to the wafer's original wallet tray.

loader:set_wafer_status

Sentio Version: 3.7.1

Description: Sets the wafer status for a wafer in a cassette or wafer wallet.

Parameters:

Parameter	Type	Values	Notes
Source Station	String	ww/waferwallet, cas1/cassette1, cas2/cassette2, cas3/cassette3
Source Station Slot	Integer	—	Cassette: 1–25; Wafer Wallet: 1–5
Wafer Status	String	progress, orientation
Value	Integer	—	Progress: 0–100; Orientation: 0–360

Response:

Field	Type	Values
Setup	String	OK

Examples:

Command:   loader:set_wafer_status ww,1,progress,50
Response:  0,0,OK     (sets wafer wallet 1 progress to 50%)

Command:   loader:set_wafer_status ww,5,orientation,45
Response:  0,0,OK     (sets wafer wallet 5 orientation to 45°)

Note for Loader: The legacy ts2500: command header is no longer supported — use loader: instead (e.g. ts2500:scan_station → loader:scan_station). All loader commands work with Wafer Wallet MAX using station cassette1.