Auxiliary Sites Substrate Commands

aux:cleaning:enable_auto

Sentio Version: 3.0.2, updated 3.7.0

Description: Enables or disables auto-cleaning.

Parameters:

Parameter	Type	Values
Enabled	String	False, True
Cycle Count (opt.)	Integer	Number of contact cycles after which cleaning should occur
Touchdown Count (opt.)	Integer	Number of touches on the cleaning pad per cleaning cycle

Response:

Field	Type	Values
Setup	String	OK

Remarks: Cycle Count and Touchdown Count must both be > 0, otherwise an error occurs. Contact cycles are only counted while auto-cleaning is enabled. If Enabled=False, Cycle/Touchdown Count (if submitted) are ignored. If Enabled=True and Cycle/Touchdown Count are not submitted, the currently set values are kept. Errors if no cleaning pad is present.

Update Logs: 3.7.0 — added Touchdown Count parameter.

aux:cleaning:start

Sentio Version: 3.0.2

Description: Starts a cleaning procedure.

Parameters:

Parameter	Type	Notes
Chuck Site (opt.)	String	—
Touch Down Count (opt.)	Integer	Default = 1

Response:

Field	Type	Values
Setup	String	OK; on error: "Execution failed" (cleaning could not be carried out) or "Execution not finished" (chuck failed to return from the cleaning site; still positioned there)

Remarks: If Chuck Site is omitted, the first cleaning pad found is used. Errors if no cleaning pad is present, the pad's lifetime is expired, or the submitted site has no cleaning pad. Touch Down Count is the number of touchdowns performed during the cleaning procedure.

aux:get_element_info

Sentio Version: 2.8.1

Description: Retrieves information about a calibration element on a calibration substrate placed on the chuck.

Parameters:

Parameter	Type
Substrate Type / Chuck Site (opt.)	String
Element Standard ID	String

Response:

Field	Type	Values	Notes
Element Type	String	Undefined, Align, Line, Load, Open, Short, Thru
Element Subtype	String	Undefined, GS, SG, GSG
X Position [µm]	Float	—
Y Position [µm]	Float	—
Spacing [µm]	Float	—	Horizontal distance between probe tips
Touch Count	Integer	—
Life Time [%]	Float	—

Examples:

Command:   aux:get_element_info 0102
Response:  0,0,Thru,GSG,0.0,0.0,150.0,20.0

Command:   aux:get_element_info AuxRight,0102
Response:  0,0,Thru,GSG,0.0,0.0,150.0,43,20.0

Remarks: Substrate may be defined by substrate type or by chuck site; if omitted, the currently active chuck site is used. Errors if the substrate type is not present, or the site has no calibration substrate. This command aggregates the responses of the various aux:get_element_* commands.

aux:get_element_life_time

Sentio Version: 2.8.1

Description: Retrieves the life time of an element on a calibration substrate placed on the chuck.

Parameters:

Parameter	Type
Substrate Type / Chuck Site (opt.)	String
Element Standard ID	String

Response:

Field	Type
Life Time [%]	Float

Examples:

Command:   aux:get_element_life_time 0102
Response:  0,0,20.0

Command:   aux:get_element_life_time AuxRight,0102
Response:  0,0,20.0

Remarks: cf. aux:get_element_info.

aux:get_element_pos

Sentio Version: 2.8.1

Description: Retrieves the position of an element on a calibration substrate placed on the chuck.

Parameters:

Parameter	Type
Substrate Type / Chuck Site (opt.)	String
Element Standard ID	String

Response:

Field	Type
X Position [µm]	Float
Y Position [µm]	Float

Examples:

Command:   aux:get_element_pos 0102
Response:  0,0,0.0,0.0

Command:   aux:get_element_pos AuxRight,0102
Response:  0,0,0.0,0.0

Remarks: cf. aux:get_element_info.

aux:get_element_spacing

Sentio Version: 2.8.1

Description: Retrieves the spacing value of an element on a calibration substrate placed on the chuck.

Parameters:

Parameter	Type
Substrate Type / Chuck Site (opt.)	String
Element Standard ID	String

Response:

Field	Type
Spacing [µm]	Float

Examples:

Command:   aux:get_element_spacing 0102
Response:  0,0,150.0

Command:   aux:get_element_spacing AuxRight,0102
Response:  0,0,150.0

Remarks: cf. aux:get_element_info.

aux:get_element_touch_count

Sentio Version: 2.8.1

Description: Retrieves the touch count of an element on a calibration substrate placed on the chuck.

Parameters:

Parameter	Type
Substrate Type / Chuck Site (opt.)	String
Element Standard ID	String

Response:

Field	Type
Touch Count	Integer

Examples:

Command:   aux:get_element_touch_count 0102
Response:  0,0,43

Command:   aux:get_element_touch_count AuxRight,0102
Response:  0,0,43

Remarks: cf. aux:get_element_info.

aux:get_element_type

Sentio Version: 2.8.1

Description: Retrieves the type of an element on a calibration substrate placed on the chuck.

Parameters:

Parameter	Type
Substrate Type / Chuck Site (opt.)	String
Element Standard ID	String

Response:

Field	Type	Values
Element Type	String	Undefined, Align, Line, Load, Open, Short, Thru
Element Subtype	String	Undefined, GS, SG, GSG

Examples:

Command:   aux:get_element_type 0102
Response:  0,0,Thru,GSG

Command:   aux:get_element_type AuxRight,0102
Response:  0,0,Thru,GSG

Remarks: cf. aux:get_element_info.

aux:get_substrate_info

Sentio Version: 2.8.1

Description: Retrieves information about a calibration substrate or cleaning pad placed on a chuck site.

Parameters:

Parameter	Type	Values
Chuck Site (opt.)	Integer / String	0/Wafer, 1/AuxRight, 2/AuxLeft, 3/AuxRight2, 4/AuxLeft2

Response:

Field	Type	Notes
Substrate Type	String	—
Substrate ID	String	—
Life Time [%]	Float	Mean lifetime of elements

Examples:

Command:   aux:get_substrate_info
Response:  0,0,AC-2,ac2,4.48

Command:   aux:get_substrate_info AuxRight
Response:  0,0,AC-2,ac2,4.48

Remarks: Chuck site may be given by name or index; if omitted, the currently active site is used. For a cleaning pad, "Substrate Type" indicates the design type (planar/brush) and "Substrate ID" is empty.

aux:get_substrate_type

Sentio Version: 2.8.1

Description: Retrieves the type of a calibration substrate placed on a chuck site.

Parameters:

Parameter	Type	Values
Chuck Site (opt.)	Integer / String	0/Wafer, 1/AuxRight, 2/AuxLeft, 3/AuxRight2, 4/AuxLeft2

Response:

Field	Type
Substrate Type	String

Examples:

Command:   aux:get_substrate_type
Response:  0,0,AC-2

Command:   aux:get_substrate_type AuxRight
Response:  0,0,AC-2

Remarks: Chuck site may be given by name or index; if omitted, the currently active site is used.

aux:retrieve_substrate_data

Sentio Version: 3.5.0

Description: Retrieves contact and home information from the configuration file and assigns it to the corresponding auxiliary site. Must be used after system start, since auxiliary site data is not retrieved automatically for safety reasons.

Parameters:

Parameter	Type	Values
Chuck Site (opt.)	Integer / String	1/AuxRight, 2/AuxLeft, 3/AuxRight2, 4/AuxLeft2

Response:

Field	Type
Number of sites data retrieved for	Integer
List of sites data retrieved for	List (String)

Examples:

Command:   aux:retrieve_substrate_data AuxRight
Response:  0,0,1,AuxRight

Command:   aux:retrieve_substrate_data 4
Response:  0,0,1,AuxLeft2

Command:   aux:retrieve_substrate_data
Response:  0,0,3,AuxRight,AuxLeft,AuxRight2

Command:   aux:retrieve_substrate_data AuxRight
Response:  0,0,0     (no data available to retrieve)

Remarks: If no chuck site is submitted, data for all auxiliary sites is retrieved. If none is available, the response's site count is 0. Data can be retrieved for each chuck site only once per system start.

aux:step_to_element

Sentio Version: 2.8.1

Description: Steps to a calibration element on the currently active chuck site.

Parameters:

Parameter	Type
Element Standard ID	String
Offset X [µm] (opt.)	Float
Offset Y [µm] (opt.)	Float

Response:

Field	Type	Values
Setup	String	OK

Examples:

Command:   aux:step_to_element 0102
Response:  0,0,OK     (move to element without offset)

Command:   aux:step_to_element 0102,100
Response:  0,0,OK     (move to element with X offset)

Command:   aux:step_to_element 0102,100,100
Response:  0,0,OK     (move to element with XY offset)

---