Chuck Commands¶

Throughout this section, Chuck Site is commonly given either as an index or a name: 0/Wafer, 1/AuxRight, 2/AuxLeft, 3/AuxRight2, 4/AuxLeft2. AuxLeft2/AuxRight2 require hardware support.

`clear_contact`¶

Sentio Version: 3.0.2

Description: Clears contact information for all chuck sites (or a single site).

Parameters:

Parameter	Type	Values	Notes
Site (opt.)	String	`Wafer`, `AuxRight`, `AuxLeft`, `AuxRight2`, `AuxLeft2`	Default clears all sites

Response:

Field	Type	Values
Setup	String	`OK`

Examples:

Command:   clear_contact
Response:  0,0,OK          (clears all site contact information)

Command:   clear_contact Wafer
Response:  0,0,OK          (clears Wafer site contact information)

Remarks: AuxLeft2/AuxRight2 need hardware support.

`enable_chuck_hover`¶

Sentio Version: 3.1.1

Description: Enables or disables hover for all chuck sites.

Parameters:

Parameter	Type	Values
Enable	Integer	`0`=disable, `1`=enable
Enable	String	`False`, `True`

Response:

Field	Type	Values
Setup	String	`OK`

`enable_chuck_overtravel`¶

Sentio Version: 2.8.1

Description: Enables or disables overtravel for all chuck sites.

Parameters:

Parameter	Type	Values
Enable	Integer	`0`=disable, `1`=enable
Enable	String	`False`, `True`

Response:

Field	Type	Values
Setup	String	`OK`

`enable_chuck_site_hover`¶

Sentio Version: 3.1.1

Description: Enables or disables hover for a single chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Enable	Integer / String	`0`/`False`=disable, `1`/`True`=enable

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: If no Site is submitted, the current site is affected.

`enable_chuck_site_overtravel`¶

Sentio Version: 2.8.1

Description: Enables or disables overtravel for a single chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Enable	Integer / String	`0`/`False`=disable, `1`/`True`=enable

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: If no Site is submitted, the current site is affected.

`get_chuck_position_hint`¶

Sentio Version: 3.5.1

Description: Returns a verbal representation of the current chuck position and the active site of the chuck.

Parameters: None

Response:

Field	Type	Values
Chuck Position Hint	String	`Probing`, `FrontLoad`, `SideLoad`, `OffAxisCamera`
Current Chuck Site	String	`Wafer`, `AuxRight`, `AuxLeft`, `AuxRight2`, `AuxLeft2`, `ChuckCamera`, `SiPhSetHoverHeight`, `SiPhFiberPowerMeasure`

Example:

Command:   get_chuck_position_hint
Response:  0,0,Probing,Wafer

`get_chuck_site_count`¶

Sentio Version: 2.8.1

Description: Retrieves the number of chuck sites.

Parameters: None

Response:

Field	Type
Count	Integer

Example:

Command:   get_chuck_site_count
Response:  0,0,5

`get_chuck_site_heights`¶

Sentio Version: 2.8.1

Description: Retrieves height information of a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`

Response:

Field	Type
Contact Height	Float
Separation Height	Float
Overtravel Gap	Float
Hover Height	Float

Remarks: If no index/name is submitted, information for the current chuck site is returned.

`get_chuck_site_index`¶

Sentio Version: 2.8.1

Description: Retrieves the index of a chuck site.

Parameters:

Parameter	Type
Name (opt.)	String

Response:

Field	Type
Index	Integer

Remarks: If no name is submitted, the index of the current chuck site is retrieved.

`get_chuck_site_name`¶

Sentio Version: 2.8.1

Description: Retrieves the name of a chuck site.

Parameters:

Parameter	Type
Index (opt.)	Integer

Response:

Field	Type
Name	String

Remarks: If no index is submitted, the current chuck site is retrieved.

`get_chuck_site_pos`¶

Sentio Version: 2.8.1

Description: Retrieves position information of a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`

Response:

Field	Type
Home X [µm]	Float
Home Y [µm]	Float
Angle [deg.]	Float

Example:

Command:   get_chuck_site_pos wafer
Response:  0,0,25000,-4000

Remarks: If no index/name is submitted, information for the current chuck site is returned.

`get_chuck_site_status`¶

Sentio Version: 2.8.1

Description: Retrieves status information of a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`

Response:

Field	Type	Values
Home is set	Integer	`-1`=Not available, `0`=False, `1`=True
Contact is set	Integer	`-1`=Not available, `0`=False, `1`=True
Overtravel is active	Integer	`-1`=Not available, `0`=False, `1`=True
Vacuum is on	Integer	`-1`=Not available, `0`=False, `1`=True

Remarks: If no index/name is submitted, information for the current chuck site is returned.

`get_chuck_speed`¶

Sentio Version: 2.8.1

Description: Retrieves the chuck speed.

Parameters: None

Response:

Field	Type	Values
Speed	String	`Fast`, `Normal`, `Slow`, `Jog`, `Index`

`get_chuck_theta`¶

Sentio Version: 2.8.1

Description: Reads the current theta angle of a chuck site with respect to site home angle.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`

Response:

Field	Type
Theta [deg.]	Float

Remarks: If no index/name is submitted, the chuck angle with respect to zero is retrieved.

`get_chuck_xy`¶

Sentio Version: 2.8.1 (Reference Position "UserDefined" added in 2.9.2)

Description: Reads the current XY position of a chuck site with respect to a reference position.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Reference Position (opt.)	String	`Center`, `Current`, `Home`, `UserDefined`, `Zero`

Response:

Field	Type
X [µm]	Float
Y [µm]	Float

Examples:

Command:   get_chuck_xy
Response:  0,0,150000,-150000            (chuck position coordinates)

Command:   get_chuck_xy Wafer
Response:  0,0,150000,-150000            (coordinates on wafer relative to wafer home)

Command:   get_chuck_xy AuxLeft,Center
Response:  0,0,-125000,-110000           (coordinates on AuxLeft relative to AuxLeft center)

Remarks: The Index/Name parameter can be omitted only if no Reference Position is submitted. With no parameters, position is given in chuck coordinates relative to "Zero". With only Index/Name, position is relative to the home of that site. Reference Position is not case sensitive.

Update Logs: 2.9.2 — added Reference Position UserDefined.

`get_chuck_z`¶

Sentio Version: 2.8.1

Description: Reads the chuck height with respect to a reference height.

Parameters:

Parameter	Type	Values
Reference Height (opt.)	String	`Zero` (default), `Contact`, `Separation`

Response:

Field	Type	Notes
Z [µm]	Float	With respect to reference

Remarks: Reference height is not case sensitive; submitting just the first character is sufficient. Contact and Separation refer to the currently active chuck site.

`get_vacuum_status`¶

Sentio Version: 2.8.1

Description: Gets the vacuum status of a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`

Response:

Field	Type	Values
State	Integer	`0`=Off, `1`=On

Remarks: Chuck site may be identified by index or by name as returned by get_chuck_site_name. If no site is submitted, the status of the currently active site is retrieved.

`move_chuck_center`¶

Sentio Version: 2.8.1

Description: Moves chuck XY to the center position of the currently active site.

Parameters: None

Response:

Field	Type	Notes
New X [µm]	Float	With respect to zero
New Y [µm]	Float	With respect to zero

`move_chuck_contact`¶

Sentio Version: 2.8.1

Description: Moves chuck to contact height. If overtravel is enabled, chuck moves to overtravel height. If contact height is not set, the command is not carried out.

Parameters: None

Response:

Field	Type	Notes
New Z [µm]	Float	With respect to zero

`move_chuck_home`¶

Sentio Version: 2.8.1

Description: Moves chuck XY to the home position of the currently active site.

Parameters: None

Response:

Field	Type	Notes
New X [µm]	Float	With respect to zero
New Y [µm]	Float	With respect to zero

`move_chuck_hover`¶

Sentio Version: 3.0.2

Description: Moves chuck to hover height. If hover height is not enabled, the command is not carried out.

Parameters: None

Response:

Field	Type	Notes
New Z [µm]	Float	With respect to zero

`move_chuck_index`¶

Sentio Version: 2.8.1

Description: Moves chuck XY a distinct number of index steps relative to a reference point. If the current chuck height is above separation height, it moves to separation before, and back to the current height after, the movement.

Parameters:

Parameter	Type	Values
Reference Point	String	`Zero`, `Home`, `Relative`, `Center`
X Steps	Integer	—
Y Steps	Integer	—

Response:

Field	Type	Notes
New X [µm]	Float	With respect to zero
New Y [µm]	Float	With respect to zero

Remarks: Reference point is not case sensitive; the first character is sufficient. Relative refers to the current position.

`move_chuck_load`¶

Sentio Version: 3.0.2

Description: Moves chuck to load position.

Parameters:

Parameter	Type	Values
Load Position	String	`Front`, `Side`

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Side door only available on machines that have a side door.

`move_chuck_separation`¶

Sentio Version: 2.8.1

Description: Moves chuck to separation height. If contact height is not set, the command is not carried out.

Parameters: None

Response:

Field	Type	Notes
New Z [µm]	Float	With respect to zero

`move_chuck_site`¶

Sentio Version: 2.8.1

Description: Moves chuck to the last active position of the selected chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`

Response:

Field	Type	Notes
New X [mm]	Float	With respect to zero
New Y [mm]	Float	With respect to zero
New Z [mm]	Float	With respect to zero
New Theta [deg.]	Float	With respect to zero

Remarks: If no last-active position exists (first move to the site after system startup), the target is the site's home position. AuxRight2/AuxLeft2 need hardware support.

`move_chuck_theta`¶

Sentio Version: 2.8.1

Description: Moves chuck theta angle to a reference point. If the chuck is above separation height, it moves to separation before, and back after, the movement.

Parameters:

Parameter	Type	Values	Notes
Reference Angle	String	`Zero`, `Site`, `Relative`	`Site` = alignment angle of the chuck site; `Relative` = current angle
Theta Offset [deg.]	Float	—	Optional; assumed 0 if omitted

Response:

Field	Type	Notes
New Theta [deg.]	Float	With respect to zero

Remarks: Reference angle not case sensitive; first character is sufficient.

`move_chuck_work_area`¶

Sentio Version: 3.0.2

Description: Moves chuck to a different camera site.

Parameters:

Parameter	Type	Values
Position	String	`P` or `Probing Camera`; `O` or `Off-axis Camera`

Response:

Field	Type	Values
Setup	String	`OK`

Example:

Command:   move_chuck_work_area off-axis
Response:  0,0,OK      (chuck moves to off-axis camera site)

Remarks: Only supported on machines with a different camera site.

`move_chuck_xy`¶

Sentio Version: 2.8.1

Description: Moves chuck XY relative to a reference point. If the current chuck height is above separation height, it moves to separation before and remains at separation height after the movement.

Parameters:

Parameter	Type	Values	Notes
Reference Point	String	`Zero`, `Home`, `Relative`, `Center`, `User`
X Offset	Float	—	Optional; default 0
Y Offset	Float	—	Optional; default 0

Response:

Field	Type	Notes
New X [µm]	Float	With respect to zero
New Y [µm]	Float	With respect to zero

Remarks: Reference point not case sensitive; first character is sufficient. Relative refers to current position.

Thermal: This command supports the thermal XY factor when "Thermal of lateral compensation enable" is active and the thermal factor has already been calculated — the movement distance is multiplied by the thermal XY factor.

`move_chuck_xyt`¶

Sentio Version: 3.0.2

Description: Moves chuck XY to move a matched pattern to the field-of-view center and correct theta to the trained pattern angle. If the current chuck height is above separation height, it moves to separation before and remains there after movement.

Parameters:

Parameter	Type
X Offset [µm]	Float
Y offset [µm]	Float
Theta Offset [deg.]	Float

Response:

Field	Type	Values
Setup	String	`OK`

Application Example:

Command:   vis:find_pattern Align,70
Response:  0,0,92,-1000,500,0.5     (match found; offset from FOV center)

Command:   move_chuck_xyt 1000,-500,-0.5
Response:  0,0,OK                   (moves the matched pattern to near FOV center, corrects theta)

Remarks: Theta rotates about the rotation center, so the rotation center must be trained before use. Parameters correspond to vis:find_pattern's response (inverse XY/theta needed to move the match to FOV center). This feature moves to a rough position on the first pass; consider running vis:find_pattern + move_chuck_xyt twice for a tighter result.

`move_chuck_z`¶

Sentio Version: 2.8.1

Description: Moves chuck Z relative to a reference point. Movement beyond the maximum permitted height is not carried out. Maximum permitted height:

Overtravel disabled & contact height not set: Max Z motion level
Overtravel disabled & contact height set: contact height
Overtravel enabled & contact height not set: Max Z motion level
Overtravel enabled & contact height set: contact height + overtravel gap

Parameters:

Parameter	Type	Values
Reference Point	String	`Zero`, `Contact`, `Separation`, `Relative`
Z Offset (opt.)	Float	—

Response:

Field	Type	Notes
New Z [µm]	Float	With respect to zero

Remarks: Reference height not case sensitive; first character sufficient. Relative refers to current height. If Z Offset is submitted, Reference Height may be omitted (defaults to Zero); if Z Offset is omitted, it is assumed to be 0.

`set_chuck_overtravel_gap`¶

Sentio Version: 2.8.1

Description: Sets the overtravel gap for all chuck sites.

Parameters:

Parameter	Type
Gap [µm]	Float

Response:

Field	Type	Values
Setup	String	`OK`

`set_chuck_separation_gap`¶

Sentio Version: 2.8.1

Description: Sets the separation gap for all chuck sites.

Parameters:

Parameter	Type
Gap [µm]	Float

Response:

Field	Type	Values
Setup	String	`OK`

`set_chuck_site_heights`¶

Sentio Version: 2.8.1

Description: Sets Z position information of a chuck site. Two alternative parameter forms are supported.

Parameters — form 1:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Position	String	`Contact`, `Separation`, `Hover`
Value (opt.)	Float	Required if Site Index/Name is submitted

Parameters — form 2:

Parameter	Type
Site Index / Name (opt.)	Integer / String
Contact Height [µm]	Float
Separation Height [µm]	Float
Overtravel Gap [µm]	Float
Hover Height [µm]	Float

Response:

Field	Type
Affected chuck site	String
Contact height of affected site [µm]	Float
Separation height of affected site [µm]	Float
Overtravel gap of affected site [µm]	Float
Hover height of affected site [µm]	Float

Examples:

Command:   set_chuck_site_heights Contact
Response:  0,0,Wafer,30000,29750,30,50     (sets contact height of current site to current chuck height)

Command:   set_chuck_site_heights S,25000
Response:  0,0,Wafer,30000,25000,30,50     (sets separation height of current site to 25000 µm)

Command:   set_chuck_site_heights 1,S,25000
Response:  0,0,Wafer,30000,25000,30,50     (sets separation height of chuck site #1 to 25000 µm)

Command:   set_chuck_site_heights 20000,19000,20,50
Response:  0,0,Wafer,20000,19000,20,50     (sets contact=20000, separation=19000, overtravel=20, hover=50 µm for current site)

Command:   set_chuck_site_heights Wafer,20000,19000,20,50
Response:  0,0,Wafer,20000,19000,20,50     (same, explicitly for site "Wafer")

Command:   set_chuck_site_heights Wafer,Hover,90
Response:  0,0,Wafer,20000,19000,20,90     (sets hover gap = 90 for site "Wafer")

Remarks: If no Site is submitted, the current site is affected. Position not case sensitive; first character sufficient. If Value is not submitted, the current chuck height is used (only possible if no Site is submitted). One of the two parameter forms must be selected. If contact height is set, the current separation and overtravel gaps of the site remain constant (their absolute heights are recalculated accordingly).

`set_chuck_site_overtravel_gap`¶

Sentio Version: 2.8.1

Description: Sets overtravel gap for a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Gap [µm]	Float	—

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: If no Site is submitted, the current site's value is set.

`set_chuck_site_pos`¶

Sentio Version: 2.8.1

Description: Sets home position information of a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Home X [µm] (opt.)	Float	—
Home Y [µm] (opt.)	Float	—
Site Angle [deg.] (opt.)	Float	—

Response:

Field	Type	Values
Setup	String	`OK`

Examples:

Command:   set_chuck_site_pos wafer,1000,1000,0
Response:  0,0,OK   (sets machine position X:1000 µm, Y:1000 µm, theta:0° as chuck home info)

Command:   set_chuck_site_pos
Response:  0,0,OK   (sets the current site and current position as chuck home info)

Remarks: If no index/name is submitted, the current chuck site is set. If no other parameter is submitted, the current chuck position is used.

`set_chuck_site_separation_gap`¶

Sentio Version: 2.8.1

Description: Sets separation gap for a chuck site.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
Gap [µm]	Float	—

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: If no Site is submitted, the current site's value is set.

`set_chuck_theta`¶

Description: Replaces set_chuck_site_pos. (Deprecated alias — see set_chuck_site_pos.)

`set_chuck_xy`¶

Description: Replaces set_chuck_site_pos. (Deprecated alias — see set_chuck_site_pos.)

`set_chuck_z`¶

Description: Replaces set_chuck_site_heights. (Deprecated alias — see set_chuck_site_heights.)

`set_high_power_air`¶

Sentio Version: 2.8.1

Description: Switches the air of a high power prober card on or off.

Parameters:

Parameter	Type	Values
State	Integer / String	`0`/`False`, `1`/`True`

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Only supported on TS2000-DP and TS2000-HP machines.

`set_soft_contact`¶

Sentio Version: 2.8.1

Description: Sets soft contact enable/disable.

Parameters:

Parameter	Type	Values
State	Integer / String	`0`/`False`, `1`/`True`

Response:

Field	Type	Values
Setup	String	`OK`

`set_stepping_contact_mode`¶

Sentio Version: 2.8.1

Description: Sets the contact behavior for stepping operations.

Parameters:

Parameter	Type	Values
Mode	String	`BackToContact` — after stepping, chuck returns to contact height if it had been in contact before; `StepToSeparation` — after stepping, chuck remains at separation; `LockContact` — stepping is disabled while chuck is at contact height

Response:

Field	Type	Values
Setup	String	`OK`

`set_user_coordinate_origin`¶

Sentio Version: 2.8.1

Description: Sets the new origin position for user coordinates.

Parameters:

Parameter	Type	Values
State	String	`Chuck`, `Scope`
New X [µm]	Float	Relative position of the origin of the user coordinates
New Y [µm]	Float	Relative position of the origin of the user coordinates

Response:

Field	Type	Values
Setup	String	`OK`

Example:

Command:   set_user_coordinate_origin chuck,0,0
Response:  0,0,OK   (sets the current position as the origin for user coordinates)

`set_vacuum`¶

Sentio Version: 2.8.1

Description: Switches the vacuum of a chuck site on or off.

Parameters:

Parameter	Type	Values
Site Index / Name (opt.)	Integer / String	`0`/`Wafer`, `1`/`AuxRight`, `2`/`AuxLeft`, `3`/`AuxRight2`, `4`/`AuxLeft2`
State	Integer / String	`0`/`False`, `1`/`True`

Response:

Field	Type	Values
Setup	String	`OK`

Remarks: Chuck site may be identified by index or name (as returned by get_chuck_site_name). If no site is submitted, the current site is affected. If "Smart Vacuum" is active and no substrate is placed on the site, vacuum cannot be switched on.

Chuck Commands¶

clear_contact¶

enable_chuck_hover¶

enable_chuck_overtravel¶

enable_chuck_site_hover¶

enable_chuck_site_overtravel¶

get_chuck_position_hint¶

get_chuck_site_count¶

get_chuck_site_heights¶

get_chuck_site_index¶

get_chuck_site_name¶

get_chuck_site_pos¶

get_chuck_site_status¶

get_chuck_speed¶

get_chuck_theta¶

get_chuck_xy¶

get_chuck_z¶

get_vacuum_status¶

move_chuck_center¶

move_chuck_contact¶

move_chuck_home¶

move_chuck_hover¶

move_chuck_index¶

move_chuck_load¶

move_chuck_separation¶

move_chuck_site¶

move_chuck_theta¶

move_chuck_work_area¶

move_chuck_xy¶

move_chuck_xyt¶

move_chuck_z¶

set_chuck_overtravel_gap¶

set_chuck_separation_gap¶

set_chuck_site_heights¶

set_chuck_site_overtravel_gap¶

set_chuck_site_pos¶

set_chuck_site_separation_gap¶

set_chuck_theta¶

set_chuck_xy¶

set_chuck_z¶

set_high_power_air¶

set_soft_contact¶

set_stepping_contact_mode¶

set_user_coordinate_origin¶

set_vacuum¶

`clear_contact`¶

`enable_chuck_hover`¶

`enable_chuck_overtravel`¶

`enable_chuck_site_hover`¶

`enable_chuck_site_overtravel`¶

`get_chuck_position_hint`¶

`get_chuck_site_count`¶

`get_chuck_site_heights`¶

`get_chuck_site_index`¶

`get_chuck_site_name`¶

`get_chuck_site_pos`¶

`get_chuck_site_status`¶

`get_chuck_speed`¶

`get_chuck_theta`¶

`get_chuck_xy`¶

`get_chuck_z`¶

`get_vacuum_status`¶

`move_chuck_center`¶

`move_chuck_contact`¶

`move_chuck_home`¶

`move_chuck_hover`¶

`move_chuck_index`¶

`move_chuck_load`¶

`move_chuck_separation`¶

`move_chuck_site`¶

`move_chuck_theta`¶

`move_chuck_work_area`¶

`move_chuck_xy`¶

`move_chuck_xyt`¶

`move_chuck_z`¶

`set_chuck_overtravel_gap`¶

`set_chuck_separation_gap`¶

`set_chuck_site_heights`¶

`set_chuck_site_overtravel_gap`¶

`set_chuck_site_pos`¶

`set_chuck_site_separation_gap`¶

`set_chuck_theta`¶

`set_chuck_xy`¶

`set_chuck_z`¶

`set_high_power_air`¶

`set_soft_contact`¶

`set_stepping_contact_mode`¶

`set_user_coordinate_origin`¶

`set_vacuum`¶